A User's Guide to Ellipsometry by Harland G. Tompkins PDF

By Harland G. Tompkins

ISBN-10: 0126939500

ISBN-13: 9780126939507

This textual content on optics for graduate scholars explains tips on how to confirm fabric houses and parameters for inaccessible substrates and unknown movies in addition to the best way to degree tremendous skinny movies. Its 14 case experiences illustrate recommendations and toughen functions of ellipsometry — rather with regards to the semiconductor and to stories regarding corrosion and oxide growth.
A User's advisor to Ellipsometry will allow readers to maneuver past constrained turn-key purposes of ellipsometers. as well as its complete discussions of the dimension of movie thickness and optical constants in movie, it additionally considers the trajectories of the ellipsometric parameters Del and Psi and the way adjustments in fabrics have an effect on parameters. This quantity additionally addresses using polysilicon, a fabric quite often hired within the microelectronics undefined, and the results of substrate roughness. 3 appendices supply beneficial references.

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Extra resources for A User's Guide to Ellipsometry

Example text

Opt. Soc. , 55,1061 (1965). F. L. McCrackin, Nat. Bur. Stand. Tech. Note 479 (1969). S. Chandrasekhar, A. S. Vengurlekar, S. K. Roy, and V. T. Karulkar, J. Appl. , 63, 2072 (1988). 1 Inaccessible Substrates and Unknown Films In Chapter 3, we discussed the Del/Psi trajectories for various kinds of films. From that discussion, it might appear that one simply measures Del and Psi and then determines by inspection the value of the thickness. The Del/Psi trajectory can readily be calculated if the filmfree values of Del and Psi are known (and hence N3 = n3 - j k3) and if the index of refraction N2 of the film is known.

The indices for the substrates are given in Table 3-1. TABLE 3-1. Optical Constants for Several Metals, along with Corresponding Δ°, Ψ0, and Depth to 1/e. 5 μ n & k values from Amer. Inst, o f Phys. Handbook, D. E. 65 on several metals. For illustration purposes, we have taken the index for the Trajectories for Absorbing Films 45 various substrates from a handbook and they are listed in Table 3-1. We emphasize that this is for illustrative purposes only; in actual practice, one should measure these for the particular samples of interest.

In fact, if these are known, one can usually use the canned software that came with the ellipsometer to determine thickness and often the index of the film. We have discussed the danger of using handbook values for the index of refraction of the substrate and urged the reader to determine the values for the particular substrate of interest, although we have not discussed how one obtains these values. For a system such as an organic film deposited on gold, it is a simple matter to measure the surface before deposition, to obtain the values of Del° and Psi°, and then to measure the film-covered surface after deposition to obtain the values of Del and Psi.

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